Multi-Function Intermediate Frequency Vacuum Coating Machine

Categories	Vacuum intermediate frequency coating equipment
Brand	UBU PVD coating machines Manufacturer
Model	ZP
Color:	can be customized
Update Time	Nov 25,2024

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Detail Information

Product Description

Multi-Function Intermediate Frequency PVD Vacuum Coating Machine

Product Profile

Multi-Function Intermediate Frequency PVD Vacuum Coating Machine is applicable to coating metal films, alloy films,

chemical films, super hardness wear-resistant films, anti-corrosion films decoration films and other different kinds of

films. (Gold, silver, black, red, blue, green and other colors are available). Combined with magnetron sputtering technology, it can coating multilayer films, which apply to hardware tool, glass crafts, ceramic crafts etc. (watches, metal outer covering, sanitary ware, mold, electronic products, crystal glass, eyeglass frame, tableware, knives and so on). In recent years, electric arc ion coating technology has been greatly developed from the original single arc source to the column arc and large flat arc etc. The combination with the technology of intermediate frequency(IF) magnetron sputtering makes it far more popular.

Technical Specification

Model	ZP-700	ZP-900		ZP-1000		ZP-1250		ZP-1400		ZP-1600
Vacuum chamber size	D700×H 900mm	D900×H 1100mm		D1000×H 1200mm		D1250×H 1350mm		D1400×H 1600mm		D1600×H 1800mm
Power supply	Intermediate frequency(IF) power supply; pulse bias power supply; arc power supply
Vacuum chamber structure	Vertical single/double door, back vacuum acquisition system
Vacuum chamber material	SS304 superior stainless steel
Ultimate vacuum	8.0×10-4Pa	8.0×10-4Pa		8.0×10-4Pa		8.0×10-4Pa		8.0×10-4Pa		8.0×10-4Pa
Pumping speed	From atmosphere to 6.7×10-3Pa spend 8~15min (no-load)
Vacuum system	Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted)
Magnetron target type	Cylindrical magnetron target, twin magnetron opposite target
Magnetron target number	Equipped by different coating processing or by user’s requirements
Rotation mode	Planetary revolution and rotation and frequency conversion speed regulation (controlled and adjustable, up-down rotation shelves, axes number is determined by actual situation)
Process gas	Mass flow controller (3-4 road), manual or automatic filling system
Cooling system	Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed (supplied by customer)
Control mode	Manual or PLC + touch screen
Alarm and protection	Water pressure alarm, atmosphere pressure alarm, over current protection, related protective measures and electrical interlock functions.
Cover area	W3m×L3.5m		W3m×L3.5m		W3.5m×L5m		W3.5m×L5m		W4.5m×L6m		W5m×L6m
Other technical data	Water pressure≥0.2MPa, water temperature≤25℃, atmosphere pressure 0.5-0.8MPa
Remark	Specific configuration size can be designed according to customer requirements. Customizable vacuum chamber size range is D 500-3000mm, H: 500-3000mm.